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COBRA BC 0600 F

Efficient:
Cost-effective, long uptime, energy-efficient
Easy servicing:
Long service intervals
Reliable:
Operationally reliable
Flexible:
Application-oriented
Quiet:
Noise level < 62 dB(A)
The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.
The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.
COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.
Applications
Load lock (conditional)
Transfer
Metrology
Lithography
Physical Vapor Deposition (PVD)
Rapid Thermal Annealing (RTA)
Strip/Ashing
Oxide Etch
Silicon Etch
Metal Etch
Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.
The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.
The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.
The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.

Pumping speed
Air at 20 °C. Tolerance: ± 10% 50 Hz 60 Hz

| 技术参数 | COBRA BC 0600 F | ||
|---|---|---|---|
| 额定抽速 | m³/h | 50 Hz | 520 |
| 前置真空泵电机额定功率 | kW | 50 Hz | 1.5 |
| 罗茨泵电机额定功率 | kW | 50 Hz | 4.0 |
| Nominal motor speed backing pump | min-1 | 50 Hz | 3000 |
| Nominal motor speed vacuum booster | min-1 | 50 Hz | 3000 |
| 极限压力 | hPa (mbar) | 0.003 | |
| 极限压力/怠速模式下的功率消耗 | kW | 50 Hz | 2.1 / 1.1 |
| 噪声级 (ISO 2151) | dB(A) | 50 Hz | 62 |
| 用水量 | l / min | 3.0 | |
| 氮气消耗 | l / min | 0-50 | |
| 重量(约) | kg | 315 | |
| 尺寸 (L x W x H) | mm | 933 x 354 x 694 | |
| 进气口/排气口 | DN 63 ISO-K / DN 40 ISO-KF |
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宁波普讯机电设备有限公司 联 系 人:刘先生
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