欢迎访问宁波普讯机电设备有限公司网站!

宁波普讯机电设备有限公司真空泵专业供应商
服务热线0574-81178779
当前位置:首页 »COBRA BC 0600 F

COBRA BC 0600 F


Efficient:
Cost-effective, long uptime, energy-efficient  
Easy servicing:
Long service intervals  
Reliable:
Operationally reliable  
Flexible:
Application-oriented  
Quiet:
Noise level < 62 dB(A)
 
The COBRA BC 0600 F is a proven dry screw vacuum pump within the COBRA BC series portfolio. It offers best-in-class pumping speeds for the most demanding solar, flat panel and semiconductor applications.

The COBRA BC series offers excellent powder and particulate handling capabilities due to its unique screw design. The proven design combines backing pump and vacuum booster in one compact frame.

COBRA series vacuum pumps offer reduced ownership costs. High-efficiency motors and an idle mode feature increase the energy efficiency. Additional savings are realized through increased uptime and a reduced footprint, making retrofitting easier in many instances.

Applications
Load lock (conditional)
Transfer
Metrology
Lithography
Physical Vapor Deposition (PVD)
Rapid Thermal Annealing (RTA)
Strip/Ashing
Oxide Etch
Silicon Etch
Metal Etch

Technical specifications
The COBRA BC 0600 F screw vacuum pump operates with two screw rotors rotating in opposite directions. This traps the medium to be pumped between the cylinder and the screw chambers and transports it to the gas discharge. The screw mechanism minimises sliding areas inside the pump and thus has optimum powder handling and restart capabilities.

The advanced screw design results in lower electric energy consumption compared to standard screw designs. It also results in a lower heat load of the compressed gas. BC series pumps use a direct cooling method resulting in uniform temperatures throughout the pump body, eliminating cold spots and providing a thermally stable water jacket.

The unique “flying bearing” screw design eliminates inlet bearing issues and allows a reduced footprint.

The COBRA BC 0600 F vacuum pump uses a high performance vacuum booster to optimize the system performance.


Pumping speed
Air at 20 °C. Tolerance: ± 10% 50 Hz 60 Hz


技术参数 COBRA BC 0600 F
额定抽速 m³/h 50 Hz 520
前置真空泵电机额定功率 kW 50 Hz 1.5
罗茨泵电机额定功率 kW 50 Hz 4.0
Nominal motor speed backing pump min-1 50 Hz 3000
Nominal motor speed vacuum booster min-1 50 Hz 3000
极限压力 hPa (mbar) 0.003
极限压力/怠速模式下的功率消耗 kW 50 Hz 2.1 / 1.1
噪声级 (ISO 2151) dB(A) 50 Hz 62
用水量 l / min 3.0
氮气消耗 l / min 0-50
重量(约) kg 315
尺寸 (L x W x H) mm 933 x 354 x 694
进气口/排气口 DN 63 ISO-K / DN 40 ISO-KF


联系我们
    宁波普讯机电设备有限公司

联 系 人:刘先生
电      话:0574-81178779
移动电话:13386625073
公司传真:4008892163-314300
公司邮箱:puxun@188.com
技术服务:13827276722 
公司地址:宁波市江东区朝晖路273号