COBRA DS screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion. The COBRA DS 8162/8163 A/E feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.

Equipped with high-efficiency motors, the COBRA DS 8162/8163 A/E offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.

Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.

Applications

High-capacity load lock

Coater process (PGMEA solvent process)

Technical specifications

COBRA DS 8162/8163 A/E are screw vacuum pumps combined with one vacuum booster. Two screw rotors inside the cylinder of the screw vacuum pump rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. The COBRA DS 8162/8163 A/E use high performance vacuum boosters to optimize the system performance.

Pumping speed

Air at 20 °C. Tolerance: ± 10%  50 Hz 60 Hz

Technical data			COBRA DS 8162 E	COBRA DS 8163 A
Nominal pumping speed	m³/h		7000	7385
Nominal motor rating vacuum booster	kW		20	20
Ultimate pressure	hPa (mbar)		0.001 (1·10-3)	0.001 (1·10-3)
Nominal motor rating backing pump	kW		2 · 15	3 · 15
Nominal motor speed backing pump	min-1		3600	3600
Power consumption at ultimate pressure / Idle mode	kW		21 / 19	30
Nominal motor speed vacuum booster	min-1		3600	3600
Noise level (ISO 2151)	dB(A)		<78	<78
Water consumption	l / min		22	31
Nitrogen consumption	l / min		2 · (0 - 200)	3 · (0 - 200)
Weight approx.	kg		2500	3320
Dimensions (L x W x H)	mm		1604 x 1470 x 1860	1604 x 2114 x 1860
Gas inlet / outlet			DN 200 / 2 · DN 63	DN 200 / 3 · DN 63