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COBRA DS 5161 / 9161 A
Advanced Screw Design
Efficient:
low operating costs, minimal maintenance, high uptime
Flexible:
application-oriented
Short Process Times:
due to high pumping speeds
Compact Design
COBRA DS 5161/9161 A are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of- the-art COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
The COBRA DS 5161/9161 A feature an integrated vacuum booster as standard, providing higher pumping speeds and ultimate pressures. The backing pump and vacuum booster are combined on a compact base frame.
Equipped with a high-efficiency motor, the COBRA DS 5161/9161 A offer excellent energy efficiency potential. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
Applications
High-density plasma CVD (HDP-CVD)
Rapid thermal processing (RTP)
Sub-atmospheric CVD (SACVD)
Metal-organic CVD (MOCVD)
Plasma-enhanced CVD (PECVD)
Low-pressure CVD (LPCVD)
Atomic layer deposition (ALD)
Technical specifications
COBRA DS 5161/9161 A are screw vacuum pumps combined with one vacuum booster. Two screw rotors inside the cylinder of the screw vacuum pump rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. The COBRA DS 5161/9161 A use a high-performance vacuum booster to optimize the system performance.
COBRA DS 5161/9161 A
Pumping speedAir at 20 °C. Tolerance: ± 10% 50 Hz 60 Hz
| Technical data | COBRA DS 5161 A | COBRA DS 9161 A | ||
|---|---|---|---|---|
| Nominal pumping speed | m³/h | 4300 | 6160 | |
| Nominal motor rating vacuum booster | kW | 15 | 20 | |
| Ultimate pressure | hPa (mbar) | 0.001 (1·10-3) | 0.001 (1·10-3) | |
| Nominal motor rating backing pump | kW | 15 | 15 | |
| Power consumption at ultimate pressure / Idle mode | kW | 50 Hz | 12.5 | 13 |
| Nominal motor speed backing pump | min-1 | 3600 | 3600 | |
| Nominal motor speed vacuum booster | min-1 | 3600 | 3600 | |
| Noise level (ISO 2151) | dB(A) | < 75 | < 75 | |
| Water consumption | l / min | min. 10 | min. 11 | |
| Nitrogen consumption | l / min | 0 – 200 | 0 – 200 | |
| Weight approx. | kg | 1440 | 1800 | |
| Dimensions (L x W x H) | mm | 1550 x 723 x 1504 | 1572 x 810 x 1860 | |
| Gas inlet / outlet | DN 250 / DN 63 | DN 200 / DN 63 |
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