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COBRA DS 0600 E
Advanced Screw Design
Efficient:
low operating costs, minimal maintenance, high uptime
Flexible:
application-oriented
Short Process Times:
due to high pumping speeds
Compact Design
COBRA DS 0600 E is a dry screw vacuum pump in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat panels and semiconductors. State-of-theart COBRA DS screw vacuum technology allows powder- and particle-laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
Equipped with a high-efficiency motor, the COBRA DS 0600 E offers excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-ofownership is very low, setting the standard in this performance class.
Retrofitting this screw vacuum pump to existing systems can be performed quickly and easily due to a fit-in-place design.、
Applications
High-density plasma CVD (HDP-CVD)
Rapid thermal processing (RTP)
Sub-atmospheric CVD (SACVD)
Metal-organic CVD (MOCVD)
Plasma-enhanced CVD (PECVD)
Low-pressure CVD (LPCVD)
Atomic layer deposition (ALD)
High-capacity load lock
Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen. Tantal coating is available for harsh applications.
COBRA DS 0600 E
Pumping speed
Air at 20 °C. Tolerance: ± 10% 50 Hz 60 Hz
| Technical data | COBRA DS 0600 E | |
|---|---|---|
| Nominal pumping speed | m³/h | 600 |
| Ultimate pressure | hPa (mbar) | 0.01 (1·10-2) |
| Nominal motor rating | kW | 15 |
| Nominal motor speed | min-1 | 3600 |
| Power consumption at ultimate pressure | kW | 9 |
| Noise level (ISO 2151) | min-1 | < 70 |
| Water consumption | l / min | min. 6 |
| Nitrogen consumption | l / min | 0 - 200 |
| Weight approx. | kg | 745 |
| Dimensions (L x W x H) | mm | 1654 x 600 x 747 |
| Gas inlet / outlet | DN 100 / DN 63 |
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