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COBRA DS 0080 / 0160 G
Advanced Screw Design
Efficient:
cost-effective, minimal maintenance, high uptime
Flexible:
application-oriented
Short Process Times:
due to high pumping speeds
Robust:
anti-corrosion coating on internal components
Compact Design
COBRA DS 0080/0160 G are dry screw vacuum pumps in the proven COBRA DS series. Their high pumping speeds, even under conditions in which a high hydrogen throughput is required, make COBRA DS screw vacuum pumps ideal for all demanding processes in the production of photovoltaic cells, flat screens and semiconductors. State-of-the-art COBRA DS screw vacuum pump technology allows powder- and particle-laden media to be evacuated.
COBRA DS dry screw vacuum pumps feature dry compression, a specially developed screw profile, and unimpeded gas discharge. The result is a high degree of vapour and particle tolerance. The screws are manufactured from a single-piece casting avoiding any gaps, making the ingress of process fluids or particles impossible, and thereby preventing corrosion.
Equipped with high-efficiency motors, the COBRA DS 0080/0160 G offer excellent energy efficiency. With low maintenance requirements, low operating costs, a very high uptime and a long life cycle, the total cost-of-ownership is very low, setting the standard in this performance class.
Retrofitting these screw vacuum pumps to existing systems can be performed quickly and easily due to a fit-in-place design.
Applications
High-density plasma CVD (HDP-CVD)
Rapid thermal processing (RTP)
Sub-atmospheric CVD (SACVD)
Metal-organic CVD (MOCVD)
Plasma-enhanced CVD (PECVD)
Low-pressure CVD (LPCVD)
Atomic layer deposition (ALD)
Technical specifications
Two screw rotors inside the cylinder of the COBRA DS rotate in opposite directions. The pumped medium is trapped between the cylinder and screw chambers, compressed, and transported to the gas outlet. During the compression process the screw rotors do not come into contact with each other or the cylinder. Thus, no lubricants or operating fluids are required in the compression chamber. COBRA DS series vacuum pumps use efficient, indirect water cooling resulting in a controllable temperature distribution throughout the pump body, and allowing to respond to process variations. The advanced screw design allows an extremely high pumping speed for the discharge of hydrogen.
COBRA DS 0080/0160 G
Pumping speed
Air at 20 °C. Tolerance: ± 10%50 Hz 60 Hz
| Technical data | COBRA DS 0080 G | COBRA DS 0160 G | ||
|---|---|---|---|---|
| Nominal pumping speed | m³/h | 50 Hz | 70 | 140 |
| Ultimate pressure | hPa (mbar) | 50 Hz | 0.03 (3·10-2) | 0.03 (3·10-2) |
| Nominal motor rating | kW | 50 Hz | 4.0 | 5.5 |
| Nominal motor speed | min-1 | 50 Hz | 3000 | 3000 |
| Power consumption at ultimate pressure | kW | 50 Hz | 2.6 | 4.3 |
| Noise level (ISO 2151) | dB(A) | 50 Hz | <62 | <68 |
| Water consumption | l / min | 50 Hz | 4.0 | 4.0 |
| Nitrogen consumption | l / min | 50 Hz | 0 – 75 | 0-75 |
| Weight approx. | kg | 50 Hz | 276 | 338 |
| Dimensions (L x W x H) | mm | 50 Hz | 865 x 385 x 667 | 975 x 425 x 697 |
| Gas inlet / outlet | 50 Hz | DN 40 / DN 40 | DN 50 / DN 40 |
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